Mems Q-Factor Enhancement Using Parametric Amplification: Theoretical Study and Design of a Parametric Device
نویسندگان
چکیده
Parametric amplification is an interesting way of artificially increasing a MEMS Quality factor and could be helpful in many kinds of applications. This paper presents a theoretical study of this principle, based on Matlab/Simulink® simulations, and proposes design guidelines for parametric structures. A new device designed with this approach is presented together with the corresponding FEM simulation results.
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ورودعنوان ژورنال:
- CoRR
دوره abs/0802.3073 شماره
صفحات -
تاریخ انتشار 2007